Browse our list of vacuum pump manufacturers, models, and pump types that we service and rebuild. Don't see a pump you are looking to have rebuilt or repaired? Contact Us Today.
Search through our vacuum pump rebuild and repair table to find your model pump.
Manufacturer | Series | Type | Model | Learn More |
---|---|---|---|---|
Edwards | GX | Dry | GX100, GX600, GX1000 | Learn More |
Edwards | iGX | Dry | iGX100L, iGX100N, iGX100M, iGX100MTI, iGX300, iGX600N, iGX600L, iGX600M, iGX1000 | Learn More |
Edwards | iH | Dry | iH35, iH80, iH160, iH600, iH1000, iH1800, iH600SC, iH1000SC, iH1000HTX, iH1800SC, iH1800HTX | Learn More |
Edwards | IL | Dry | IL70, IL600 | Learn More |
Edwards | IXH | Dry | IXH100, IXH200, IXH610, iXH1210, iXH1220, iXH1820, IXH3030, IXH3045, IXH4545, IXH6045 | Learn More |
Edwards | iXL | Dry | iXL120, iXL250, iXL500, iXL750 | Learn More |
Edwards | QDP | Dry | QDP40, QDP80 | Learn More |
Edwards | iQDP | Dry | iQDP40, iQDP80 | Learn More |
Edwards | EDP | Dry | EDP80, EDP160, EDP200, EDP250, EDP400 | Learn More |
Edwards | GV | Dry | GV80, GV160, GV250, GV400, GV600 | Learn More |
Edwards | DP | Dry | DP40, DP80 | Learn More |
Edwards | CDP | Dry | CDP40, CDP80 | Learn More |
Edwards | Controllers | Dry | Q Controller, MCM, Motor Control Module, A38059000, A38128100, A38201000, A38203000, A38209000, A38221000, A38225000, A38229000, A38233000, Q80.4.2.2 | Learn More |
Alcatel/Adixen/Pfeiffer | ACP | Dry | ACP15, ACP20, ACP28, ACP40 | Learn More |
Alcatel/Adixen/Pfeiffer | ADP | Dry | ADP31, ADP80, ADP81, ADP122 | Learn More |
Alcatel/Adixen/Pfeiffer | ADS | Dry | ADS122, ADS301, ADS501, ADS602, ADS1202 | Learn More |
Alcatel/Adixen/Pfeiffer | IPUP | Dry | A100L, A100V | Learn More |
Alcatel/Adixen/Pfeiffer | Drytel | Dry | Drytel 31, Drytel 34, Drytel 100, Drytel 1025 | Learn More |
Ebara | EV-A | Dry | EV-A03, EV-A06, EV-A10 | Learn More |
Ebara | EV-M | Dry | EV-M20N, EV-M102N, EV-M202N, EV-M302N, EV-M502N, EV-M802N | Learn More |
Ebara | EV-S | Dry | EV-S20, EV-S20P, EV-S20N, EV-S50, EV-S50P, EV-S50N, EV-S100, EV-S100P, EV-S100N, EV-S200, EV-S200P, EV-S200N | Learn More |
Ebara | EST | Dry | EST25N, EST100WN, EST101WN, EST200WN, EST300WN, EST500WN, EST800WN | Learn More |
Ebara | ESA | Dry | ESA25S, ESA25D, ESA25XW, ESA70W, ESA80W, ESA100W, ESA200W, ESA300W, ESA500W | Learn More |
Ebara | ESR | Dry | ESR20N, ESR30N, ESR80WN, ESR200WN, ESR300WN | Learn More |
Ebara | UERR | Dry | 40X20, 50X20, 65x40, 80X25, 150X40 | Learn More |
Ebara | A | Dry | A07V, A10S, A25S, A30W, A70W, A150WM, A150WT | Learn More |
Ebara | AA | Dry | AA10N, AAL10, AA20, AA30, AA40WN, AA70WN, AA100WN, AA200WN, AA300WN | Learn More |
Ebara | AAS | Dry | AAS20N, AAS70WN, AAS100WN, AAS200WN, AAS300WN | Learn More |
Busch | Dry Pumps | Dry | COBRA NX 0450, COBRA NX 0650, COBRA NC 0100, COBRA NC 0200, COBRA NC 0300, COBRA NC 0400, COBRA NC 0630, COBRA NC 1000, COBRA NC 2500, COBRA DL 0080 , COBRA DS 0080, COBRA DL 0160, COBRA DS 0160, COBRA DS 0600, COBRA DS 0700, COBRA DS 1000, COBRA DS 2000, COBRA DS 2610, COBRA DS 3010, COBRA DS 5161, COBRA DS 9161, COBRA DS 8162, COBRA DS 8163, COBRA BA 0100, COBRA BC 0100, COBRA BC 0101, COBRA BC 0600, COBRA BC 1000, COBRA BC 2000 | Learn More |
Busch | Dry Pump Controllers | Dry | 0985-523-545, 0985-523-593, 0985-524-593, 0985-527-002, 0985-527-020, 0985-527-021, 0985-529-050, 0985-532-727 | Learn More |
Pfeiffer | Diaphragm Pumps | Dry | PM12569-840.3 | Learn More |
Vacuubrand | Diaphragm Pumps | Dry | MD8, MD4, MD4NT | Learn More |
KNF Neuberger | Diaphragm Pumps | Dry | UN840.3FTP | Learn More |
Danielson | Tribodyne | Dry | DanVac TD-30/16, DanVac TD-30/120-HVP | Learn More |
Thomas | Diaphragm Pumps | Dry | 688CE44 | Learn More |
Edwards | E1M | Rotary Vane | E1M5, E1M8, E1M12, E1M18, E1M40, E1M80, E1M175, E1M275 | Learn More |
Edwards | E2M | Rotary Vane | E2M0.7, E2M1, E2M1.5, E2M2, E2M5, E2M8, E2M12, E2M18, E2M28, E2M30, E2M40, E2M80, E2M175, E2M275 | Learn More |
Edwards | RV | Rotary Vane | RV3, RV5, RV8, RV12 | Learn More |
Leybold | A/AC | Rotary Vane | D2, D4, D8, D16, D30, D60, D90 | Learn More |
Leybold | B/BCS | Rotary Vane | D1.6, D4, D8, D16, D25, D40, D65, S25, S40, TI16B | Learn More |
Leybold | E | Rotary Vane | D2.5E, D5E, D10E, D16E | Learn More |
Leybold | S | Rotary Vane | S100, S250, S400, S630 | Learn More |
Leybold | SV | Rotary Vane | SV16, SV25, SV40, SV65, SV100, SV180, SV200, SV280, SV300, SV500, SV585, SV630, SV750, SV1200 | Learn More |
Alcatel/Adixen | Pascal | Rotary Vane | 1021, 3004, 1004A, 1005C, 1005SD, 1010SD, 1012A, 1015SD, 2002BB, 2002C1, 2004A, 2005C1, 2005H, 2005I, 2005SD, 2008A, 2008AC, 2010C1, 2010C2, 2010SD, 2012A, 2012AC, 2012CP, 2012H, 2015C1, 2015C2, 2015H, 2015SD, 2020A, 2020CP, 2021C1, 2021C2, 2021I, 2021SD, 2033A/SD, 2033C1, 2033CP+/C2, 2033H, 2063A/SD, 2063C1, 2063CP+/C2, 2063H, 2100A/SD, 2100C1, 3005SD | Learn More |
Pfeiffer | DuoLine | Rotary Vane | Duo 1.5, Duo 1.6, Duo 2.5, Duo 3, Duo 5, Duo 6, Duo 11, Duo 30, Duo 65 | Learn More |
Agilent | DS | Rotary Vane | DS 40M, DS 102, DS 202, DS 302, DS 402, DS 602, DS 1002, DS 1602 | Learn More |
Agilent | MS | Rotary Vane | MS 40+, MS-101, MS-301, MS-631 | Learn More |
Agilent | HS | Rotary Vane | HS602 | Learn More |
Varian | SD | Rotary Vane | SD-40, SD-90, SD-91, SD-200, SD-201, SD-300, SD-301, SD-450, SD-451, SD-700, SD-1400, SD-2500 | Learn More |
Busch | R 5 | Rotary Vane | R 5 0010/0016 C, R 5 RA0025/0040, R 5 RA0063/0100, R 5 RA0155, R 5 RA0160-0302, R 5 RA0165-0305, R 5 RA0400-0630, R 5 RA0750, R 5 RA1000/1600, R 5 RAH 200/300, R 5 RB 0006, R 5 RB 0021, R 5 RC0400, R 5 RC0250 | Learn More |
Stokes | Microvane | Rotary Vane | V-005-2, V-009-2, V-013-2, V-017-2, V-023-2, V-013-241, V-017-441, V-023-441, V-005-241, V-009-241 | Learn More |
Welch | Duo-Seal Pumps | Rotary Vane | 1373, 1374, 1375, 1376, 1380, 1395, 1396, 1397, 1398, 1399, 1400, 1402, 1405, 8915, 1402N, 1402Z-34, 8890A, 8905A, 8907A, 8910A, 8912A, 8917A, 8920A, 8925A | Learn More |
Kinney | KSV | Rotary Vane | KSV-100, KSV-16, KSV-200, KSV-25, KSV-300, KSV-40, KSV-630, KSV-65 | Learn More |
Leybold | E | Rotary Piston | E75, E150, E250 | Learn More |
Leybold | DK | Rotary Piston | DK100, DK200 | Learn More |
Stokes | -- | Rotary Piston | 149H-11, 148H-10, 149, 212H-10, 412, 612, 912, C300, 146H-13, 212H-11, 212J, 212J-14, 412H-10, 412H-11, 412H-33, 412J-14, 612-30 | Learn More |
Kinney | -- | Rotary Piston | KC15, KC5, KC8, KDH130, KT505LP, KT850C/D, KTC112, KTC21, KVAC-10, KVAC-15, KVAC-2, KVAC-21, KVAC-33, KVAC-5, KVAC-63 | Learn More |
Edwards | EH | Roots Blower | EH250, EH500, EH1200, EH2600, EH4200 | Learn More |
Edwards | QMB | Roots Blower | QMB250, QMB500, QMB1200 | Learn More |
Leybold | WA | Roots Blower | WA151, WA251, WA501, WA1001, WA2001 | Learn More |
Leybold | WAU | Roots Blower | WAU151, WAU251, WAU501, WAU1001, WAU-2001 | Learn More |
Leybold | WSU | Roots Blower | WSU151, WSU251, WSU501, WSU1001, WSU2001 | Learn More |
Leybold | WS | Roots Blower | WS151, WS251, WS501, WS1001, WS2001 | Learn More |
Leybold | RA | Roots Blower | RA2001, RA3001, RA5001, RA7001, RA9001 | Learn More |
Alcatel/Adixen | RSV | Roots Blower | RSV 151, RSV 300, RSV 301, RSV600, RSV 601, RSV 602, RSV1002, RSV 1502, RSV 2000, RSV1202 | Learn More |
Busch | -- | Roots Blower | WY1250, WY250, WY500, WZ1000, WZ2000 | Learn More |
Stokes | -- | Roots Blower | 306, 310, 607, 615, 622, 306-041, 306-1, 306-401, 306-402, 310-1, 310-401, 310-402, 310-41, 607-1, 61B-MHR, 615HM7, 615-MHR, 615-1, 615-4MH, 615-402, 615-5HR, 615-7, 615-7M, 622-MHXXS, 622-MH25, 622-2, 622-4HM, 1721, 1722, 1738 | Learn More |
Roots | -- | Roots Blower | RGS-1009, RGS-1012, RGS-1016, RGS-1018, RGS-1021, RGS-1024, RGS-1030, RGS-1228, RGS-1236, RGS-615 | Learn More |
Aerzen | -- | Roots Blower | GLa 12.5 HV, GMa/GLa 11.3, GMa/GLa 12.5, GMa/GLa 12.6V-00, GMa/GLa 13.8, GMa/GLa 13.f7, GMb 15.10HV, GMb/GLb14.9HV, GMb/GLb15.11HV, GMb/GLb16.f13HV, V1500, V2000, V2500, V500 | Learn More |
Edwards | XDS | Scroll | XDS5/5C, XDS10/10C, XDS35i, XDS46i | Learn More |
Edwards | nXDS | Scroll | nXDS6i, nXDS10i, nXDS15i, nXDS20i | Learn More |
Edwards | ESDP | Scroll | ESDP12, ESDP30 | Learn More |
Edwards | GVSP | Scroll | GVSP12, GVSP30 | Learn More |
Leybold | -- | Scroll | SC 5 D, SC 15 D, SC 30 D | Learn More |
Agilent | IDP | Scroll | IDP-3, IDP-7, IDP-10, IDP-15 | Learn More |
Agilent | SH | Scroll | SH-110, SH-112 | Learn More |
Varian | Triscroll | Scroll | Triscroll 300, Triscroll 600, PTS03101UNIV, SE E31001197, SH100, TRISCROLL 620, 300DS, 600DS | Learn More |
Ulvac | -- | Scroll | DIS251 | Learn More |
Anest Iwata | -- | Scroll | ISP250, ISP250B, ISP250C, ISP500A, ISP500B | Learn More |
Edwards Pumps | EXT | Turbo | EXT70, EXT75DX, EXT250, EXT255, EXT501, EXT200-200-30, EXT400-200-30 | Learn More |
Edwards Pumps | nEXT | Turbo | nEXT240D, nEXT300D, nET400D | Learn More |
Seiko Pumps | STP | Turbo | STP200, STP300, STP301, STP400, STP451, STP600, STP1000, STP1003, STP603, STP2000, STP2001, STP2002, STP1003 | Learn More |
Seiko Pumps | STPA | Turbo | STPA803C, STPA1303C, STPA1603C, STPA2203C | Learn More |
Seiko Pumps | STPH | Turbo | STPH200C, STPH300C, STPH301C, STPH600C, STPH603C, STPH1000C, STPH1301, STPH2000C, STPH2001, STPH2002, STPH451C | Learn More |
Seiko Pumps | STP-L | Turbo | STP-L301, STP-L451 | Learn More |
Seiko Pumps | STPX | Turbo | STP-XA2703C, STP-XA3203C, STP-XA4503C | Learn More |
Osaka | TS | Turbo | TS443 | Learn More |
Leybold | MAG | Turbo | MAG 2000, MAG 2200 | Learn More |
Leybold | MAGW | Turbo | MAGW1300, MAGW 2000, MAGW 2010 | Learn More |
Leybold | T | Turbo | T1600 | Learn More |
Leybold | TMP | Turbo | TMP 35, TMP 50, TMP 150, TMP 151, TMP 340, TMP 360, TMP 361, TMP 410, TMP 400, TMP 450, TMP 600, TMP 1000, TMP 1100, TMP 1500 | Learn More |
Leybold | TW | Turbo | TW 250, TW 300, TW 701, TW700, TW901, TW220-150-15s, TW400/300/25S | Learn More |
Pfeiffer | HiPlace | Turbo | HiPace 30, HiPace 80, HiPace 300, HiPace 800, HiPace 1200, ATH 2804, ATH 3204, TMH/U 064, TMH/U 065, TMH/U 071, TMH/U 260, TMH/U 261, TMH/U 520, TMH/U 520C, TMH/U 521, TMH1600P/C, TMH262, TMU1600MC, TMU1601PCH, TPD020, TPH/U 040, TPH/U 062, TPH/U 170, TPH/U 180H, TPH/U 190, TPH/U 240, TPH/U 261, TPH/U 270, TPH/U 330, TPH/U 330C, TPH/U 510, TPH/U 510C, TPH/U 520, TPH/U 520C, TPH/U050, TPH/U060, TPH/U1201, TPH2200 SG, TPH2201U/P, Splitflow 80 | Learn More |
Alcatel/Adixen | MDP | Turbo | MDP 5010, MDP 5011, MDP 5030 | Learn More |
Alcatel/Adixen | ATH | Turbo | ATH 400, ATH 1300, ATH 1600, ATH 2300 | Learn More |
Alcatel/Adixen | ATP | Turbo | ATP 80, ATP 100, ATP 150, ATP 400, ATP 900 | Learn More |
Alcatel/Adixen | ATS | Turbo | ATS 100, ATS 200 | Learn More |
Alcatel/Adixen | PTM | Turbo | PTM 5154 | Learn More |
Alcatel/Adixen | 5000 Series | Turbo | 5081, 5101, 5150, 5402, 5030, 5400, 5402, 5900 | Learn More |
Agilent | TwisTorr | Turbo | TwisTorr 84, TwisTorr 304, Turbo-V 2300 TwisTorr | Learn More |
Agilent | K-G | Turbo | Turbo-V 1K-G, Turbo-V 2K-G , Turbo-V 3K-G | Learn More |
Varian | Navigator | Turbo | V301 NAV, V250, Turbo-V 701, TV1001, V550, V70, V300, V300HT, V81T, TV81, V801, V551, V81M, V700HT | Learn More |
Alcatel Turbo Controllers | ACT | Turbo | ACT 100 T, ACT 200 T, ACT250, ACT 600 T, ACT 1000 T, ACT1300M | Learn More |
Alcatel Turbo Controllers | CFV | Turbo | CFV 10, CFV 100, CFV 900, 8220, AS120, CFF450, CV100 | Learn More |
Pfeiffer Turbo Controllers | -- | Turbo | DCU100, DCU200, DCU600, HICUBE 80, TCP 600, TCP040, TCP120, TCP121, TCP270, TCP300, TCP310, TCP380, TCP5000, TCP-350, TIC250 | Learn More |
Edwards Turbo Controllers | -- | Turbo | EXC100L, EXC250E, EXDC160 | Learn More |
Leybold Turbo Controller | -- | Turbo | NT10, NT1000/1500, NT12, NT150/360, NT151/361, NT20, NT340M, NT340MC/T, NT361, NT450, NT50, NT-341MT, TDS | Learn More |
Seiko Turbo Controller | -- | Turbo | SCHU1000, SCUA1303C, SCUA2203C, SCUA2203LVS, SCUA2203P, SCUH1000, SCUH1000C, SCUH1301, SCUH1303CV2, SCUH200C, SCUH2000C, SCUH2000K, SCUH301C, SCUH600C, SCU1000, SCU1000C, SCU1003C, SCU2000C, SCU2001C, SCU2002C, SCU2203, SCU300, SCU300C, SCU300H, SCU301, SCU301H, SCU400, SCU600, SCU600C, SCU603, SCU750, SCU803, SCU1500 | Learn More |
Osaka Turbo Controller | -- | Turbo | TC440, TD2001, TD381/411, TD711/1111-C | Learn More |
Varian Turbo Controllers | -- | Turbo | TV550, T550, V300HTV, V301 NAV CONTRL | Learn More |
Agilent/Varian/NRC | -- | Diffusion | VHS-4, AX-65, H4X, HAS, HS-16, HS-2, HS-20, HS-32, HS-4, HS-6, M-2, M-4, M-6, NHS-35, NHS-4, NHS-6, VHS-10, VHS-250, VHS-400, VHS-6 | Learn More |
Edwards | -- | Diffusion | 18B4B, 30B5M, E012, E04, E06, E09, HT10, HT16B, HT20B, SI100 | Learn More |
Stokes | -- | Diffusion | 150-16, 150-10, 150-6, 150-4 | Learn More |
CVC | -- | Diffusion | PMC-2, PMC-2, KS-200, PMC-4, PMC-4, PMC-4, PMC-6, PMC-6, PMC-6, PVMS-10, PMC-10, PMC-10, PVMS-11 (-12), PVMS-11 (-12), PVM-16, PVM-20, PMC-20C, PMC-20C, PMC-20C, PMC-20C, PVM-32, PVM-32, PMC-32C (-48C), PMC-32C (-48C), PMC-32C (-48C), PMC-32C (-48C), KS2000 | Learn More |
Leybold | -- | Diffusion | DIP 3 000, DIP 8 000, DIP 12 000, DIP 20 000, DIP 30 000, DIP 50 000 | Learn More |
Brooks/CTI | Cryo-Torr Cryopumps | Cryo | CT-4, CT-4F, CT-8, CT-8F, CT-10, CT-10F, CT-250, CT-250F, CT-400, CT-500 | Learn More |
Brooks/CTI | On-Board Cryopumps | Cryo | Onboard 4, Onboard 4F, Onboard 8, Onboard 8F, Onboard 8FE, Onboard 10, Onboard 10F, Onboard 250, Onboard 250F, Onboard 400, Onboard 400F, Onboard 500, Onboard 500F, P300 | Learn More |
Brooks/CTI | On-Board IS Cryopumps | Cryo | IS 8F, IS 250F, IS 320FE | Learn More |
Brooks/CTI | Compressors | Cryo | 8200, 8500, 8510, 9600, 9700 | Learn More |
Austin Scientific | Cryo Pumps | Cryo | Cryoplex 10, Cryoplex 8, CP-8 | Learn More |
Trillium | Cryo Pumps | Cryo | CP8, CP8LP, CP10, CP16 | Learn More |
Alcatel | -- | Leak Detector | ASM10, ASM110, ASM120, ASM121, ASM122D, ASM140H, ASM142, ASM151, ASM180, ASM180TD, ASM182 TD1, ASM182T, ASM192, ASM310, ASM340, ASM380, ASM52, DGC-151 | Learn More |
Edwards | -- | Leak Detector | Spectron 3000, Spectron 600, Spectron 300E, Spectron 5000 | Learn More |
Leybold/Inficon | -- | Leak Detector | Phoenix XL Dry, UL500, UL1000, Leak Detector, L200, Phoenix 300, UL400, UL5000, UL100, UL1000 Dry, UL200, UL1000 Fab, UL100T, UL100+, UL200D | Learn More |
Pfeiffer | -- | Leak Detector | HLT150, HLT160 | Learn More |
Agilent/Varian | -- | Leak Detector | 938-41, 947, 979, 936-40, 956, 948, 959, VSMR151, VSC15, VSPD03, VSPRO2, VSMD30+, VSMR15, VSBD30+, VSVR15, VWMD15, 936-40, 936-70SP, 947D, 948D, 949, 956, 956D, 959D, 960D, 979, 979D | Learn More |
Veeco/VIC | -- | Leak Detector | MS-45, MS-17, MS-30T, MS-40, MS-170, MS-40GT, MS-9, MS-40GT Plus, MS-18, MS-40GT Dry, MS-60 PLUS, MS-60, MS-60 Dry, MS-20, MS-40D, MS-50, MS-45 | Learn More |
Ulvac | -- | Leak Detector | 901DS, 904D3, 904D4 | Learn More |
We offer expert rebuilds, remanufactured units, and technical assistance for your vacuum pumps. Select an option below or call us at (800) 272-2525 so our team can help you as quickly as possible.